Vertical Tube Furnace

Product Overview

High-purity quartz or alumina tubes with vacuum seal flange system. Ideal for pre-sintering, sintering, coating, CVD processes, and carbon nanotube/silicon nanowire fabrication under vacuum or protective atmosphere.

Features

Max temperature: * 1200°C (FeCrAl resistance wire)

1400°C (SiC heater)

1600°C (MoSi2 heater)

Intelligent control: 50-step programmable automatic control system.

Double-layer air-cooling system.

Sealing: Stainless steel double-seal flanges.

Tube protection: Adjustable flange supports at both ends extend tube life.

Over-temperature protection: automatic power cut when exceeding set value.

Leakage protection: automatic power cut upon leakage detection.

Heating rate: ≤20°C/min

Temperature control accuracy: ±1°C

Max vacuum: -0.1 MPa

High vacuum: Up to 7×10⁻⁴ Pa with turbo molecular pump unit.

Standard Accessories

● Tube plugs (insulation) ×4

● Thermocouple ×1

● Furnace tube ×1

● Vacuum pump ×1

● Vacuum flange set ×1

● Vacuum gauge ×1

Technical Specifications

1200°C Series

ModelTube Dia. × Heating Length (mm)Power (kW)Max Temp. (°C)Working Temp. (°C)ThermocoupleTube MaterialHeating Element
12NVT-40/30040x300312001100K-typeQuartz tubeMo resistance wire
12NVT-60/30060x3003
12NVT-80/30080x3005
12NVT-100/300100x3005
12NVT-120/300120x3006
12NVT-40/45040x4503
12NVT-60/45060x4503
12NVT-80/45080x4505
12NVT-100/450100x4505
12NVT-120/450120x4506

1400°C Series

ModelTube Dia. × Heating Length (mm)Power (kW)Max Temp. (°C)Working Temp. (°C)ThermocoupleTube MaterialHeating Element
14SVT-40/30040x300414001300S-typeAlumina tubeSiC heater
14SVT-60/30060x3004
14SVT-80/30080x3004
14SVT-100/300100x3006
14SVT-120/300120x3006
14SVT-40/45040x4504
14SVT-60/45060x4504
14SVT-80/45080x4504
14SVT-100/450100x4506
14SVT-120/450120x4506

1600°C Series

ModelTube Dia. × Heating Length (mm)Power (kW)Max Temp. (°C)Working Temp. (°C)ThermocoupleTube MaterialHeating Element
16MVT-40/30040x300416001500B-typeAlumina tubeMoSi2
16MVT-60/30060x3004
16MVT-80/30080x3004
16MVT-100/300100x3006
16MVT-120/300120x3006
16MVT-40/45040x4505
16MVT-60/45060x4505
16MVT-80/45080x4505
16MVT-100/450100x4509
16MVT-120/450120x4509

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