The CVD/PECVD system is a thin film deposition device based on PECVD technology. It enables thin film formation of metals, semiconductors, and insulators for microelectronics, photonics, FPD, and energy storage applications.
Max temperature: 1200°C (HRE resistance wire)
Intelligent control: 50-step programmable automatic control system.
Double-layer air-cooling system keeps exterior surface temperature below 50°C.
High-quality insulation: Vacuum-formed alumina polycrystalline fiber using Japanese technology.
High-vacuum seal: SUS304 stainless steel KF quick-release flanges.
High deposition: RF glow discharge achieves up to 10 Å/s.
Excellent uniformity: Multi-point RF feed-in, specialized gas flow, and heating achieve film uniformity within 8%.
High reproducibility: Substrate-to-substrate variation below 2% per batch.
Safety: Over-temperature protection (auto power-off), leakage protection.
Standard: Direct-coupled vacuum pump (10 Pa), 3-channel MFC.
RF power: 500W max, 13.56 MHz ±0.005%, single-phase AC 208-240V.
● High vacuum system (turbo molecular pump: 7×10⁻⁴ Pa)
● Gas mixing system and additional MFC
● High-resolution touch panel
| Product Name | CVD Chemical Vapor Deposition System |
|---|---|
| Model Name | CVD/PECVD |
| Slide Mechanism | With slide rail. Rapid heating/cooling by moving the furnace body. |
| Heating Length | 400mm (1 zone / 2 zone available) |
| Tube Dimensions | OD 60mm × Length 1200mm |
| Tube Material | High-purity quartz tube |
| Working Temp. | ≤ 1100℃ |
| Control Method | Automatic temperature control by AI-equipped PID instrumentation |
| Control Accuracy | ±1°C (with over-temp / disconnection alarm) |
| Heating Rate | Recommended 0-10°C/min |
| Heating Element | High-quality resistance wire |
| Item | Specification |
|---|---|
| Rated Voltage | Single-phase 220V 50Hz |
| Compatible Gas | Inert gases (N2, Ar, etc.) and various process gases |
| Vacuum Flange | Gas inlet port, pressure regulator valve, auto leak valve, exhaust valve |
| Gas Supply System | 4-channel high-precision MFC, touch panel control |
| Vacuum Exhaust | Rotary pump (ultimate vacuum 1Pa at cold state), high-precision digital vacuum gauge |
| Pressure Control | Controllable in relative pressure range -20kPa to 20kPa |
| Item | Specification |
|---|---|
| Rated Voltage | Single-phase 220V 50Hz |
| Signal Frequency | 13.56 MHz ± 0.005% |
| Max Output | 500W |
| Max Reflected Power | 500W |
| Output Connector | 50Ω N-type (female) |
| Output Stability | ±0.1% |
| Harmonic Component | ≤ -50 dBc |
| Supply Voltage | Single-phase AC 187V-253V (50/60Hz) |
| Cooling Method | Forced air cooling |
| Model | Tube Dia. × Heating Length (mm) | Total Tube Length (mm) | Power (kW) | Max Temp. (°C) | Gas Control | Vacuum (Pa) |
|---|---|---|---|---|---|---|
| CVD-60 | Φ60×400 | 1200 | 3 | 1200 | 3-channel | 10Pa/7x10-3 |
| CVD-80 | Φ80×400 | 1200 | 4 | 1200 | 3-channel | 10Pa/7x10-3 |
| CVD-100 | Φ80×400 | 1200 | 6 | 1200 | 3-channel | 10Pa/7x10-3 |
| Model | Tube Dia. × Heating Length (mm) | Power (kW) | Max Temp. (°C) | RF Power | Gas Control | Vacuum (Pa) | |
|---|---|---|---|---|---|---|---|
| Frequency | Output | ||||||
| PECVD-60 | Φ60×450 | 4 | 1200 | 13.56MHz±0.005% | 300-500W | 3-channel | 10Pa/7x10-3 |
| PECVD-80 | Φ80×450 | 5 | 1200 | 3-channel | 10Pa/7x10-3 | ||
| PECVD-100 | Φ100×450 | 7 | 1200 | 3-channel | 10Pa/7x10-3 | ||
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