This furnace minimizes oxygen content through pre-vacuuming, then introduces inert gases (N2, Ar) to create an ideal atmosphere-protected heat treatment environment. Widely used in material research labs and small-scale semiconductor/silicon nitride production.
Temperature range: RT to 1700°C.
High-quality insulation: Alumina polycrystalline fiber lining for uniform temperature distribution without sample contamination.
High-rigidity vacuum structure: Fully sealed with double steel plates, reinforced with 12mm ribs to prevent deformation. Max vacuum: -0.08 MPa (ultimate: -0.1 MPa).
Precision control: Industrial-grade instruments (0.2 class) with PID and 50-step programming.
Excellent sealing: Four manual handles with high-quality silicone gaskets ensure reliable airtightness.
● Door insulation block (except 1200 series)
● Heat-resistant gloves
● Crucible tongs
● Instruction manual
● Spare heating elements ×2 (except 1200 series)
● Oil rotary vacuum pump
● Direct-coupled vacuum pump (high-speed evacuation)
● Touch panel / PC software
● Crucibles and multi-layer setters
● Heating element upgrades (SiC heater, MoSi2 heater)
● Gas supply system (float flowmeter / MFC, 2 or 3 channels)
| Model | Max Temp. (°C) | Working Temp. (°C) | Chamber size (WHD mm) | Voltage (V) | Power (kW) |
|---|---|---|---|---|---|
| 12AN-2 | 1200 | 1100 | 120*120*130 | 220 | 1.2 |
| 12AN-3 | 1200 | 1100 | 150*150*150 | 220 | 2.5 |
| 12AN-5 | 1200 | 1100 | 150*150*200 | 220 | 3 |
| 12AN-8 | 1200 | 1100 | 200*200*200 | 220 | 5 |
| 12AN-12 | 1200 | 1100 | 200*200*300 | 220 | 6 |
| 12AN-27 | 1200 | 1100 | 300*300*300 | 380 | 8 |
| 12AN-36 | 1200 | 1100 | 300*300*400 | 380 | 10 |
| 12AN-64 | 1200 | 1100 | 400*400*400 | 380 | 16 |
| Model | Max Temp. (°C) | Working Temp. (°C) | Chamber size (WHD mm) | Voltage (V) | Power (kW) |
|---|---|---|---|---|---|
| 14AS-1 | 1400 | 1300 | 100*100*100 | 220 | 1 |
| 14AS-2 | 1400 | 1300 | 120*120*130 | 220 | 2 |
| 14AS-3 | 1400 | 1300 | 150*150*150 | 220 | 3 |
| 14AS-5 | 1400 | 1300 | 150*150*200 | 220 | 4 |
| 14AS-8 | 1400 | 1300 | 200*200*200 | 220 | 5 |
| 14AS-12 | 1400 | 1300 | 200*200*300 | 220 | 7 |
| 14AS-27 | 1400 | 1300 | 300*300*300 | 380 | 9 |
| 14AS-36 | 1400 | 1300 | 300*300*400 | 380 | 11 |
| 14AS-64 | 1400 | 1300 | 400*400*400 | 380 | 18 |
| Model | Max Temp. (°C) | Working Temp. (°C) | Chamber size (WHD mm) | Voltage (V) | Power (kW) |
|---|---|---|---|---|---|
| 17AM-1 | 1700 | 1600 | 100*100*100 | 220 | 1 |
| 17AM-2 | 1700 | 1600 | 120*120*130 | 220 | 3 |
| 17AM-3 | 1700 | 1600 | 150*150*150 | 220 | 4 |
| 17AM-5 | 1700 | 1600 | 150*150*200 | 220 | 5 |
| 17AM-8 | 1700 | 1600 | 200*200*200 | 220 | 7 |
| 17AM-12 | 1700 | 1600 | 200*200*300 | 220 | 8 |
| 17AM-27 | 1700 | 1600 | 300*300*300 | 380 | 10 |
| 17AM-36 | 1700 | 1600 | 300*300*400 | 380 | 12 |
| 17AM-64 | 1700 | 1600 | 400*400*400 | 380 | 20 |
For product inquiries, quotation requests and more, please feel free to contact us.
Contact